Description

The Vision 2000-C and Vision 2000-E incorporate the

“smart head” RGA technology of the Microvision 2 with

a closed ion source and close-coupled inlet. This state-

of-the-art RGA technology is integrated with Process

Eye Professional control platform, a recipe based, user-

configurable software program. The combination of

closed ion source and automated inlet allows seamless

monitoring of the complete CVD or Etch process cycle,

from base vacuum to process pressures of up to 700 Torr.

By maximizing the ratio between CVD or Etch chamber

gas signals and the gas background in the differentially

pumped Vision 2000-C and Vision 2000-E analyzer

housing, the closed ion source enables ppm-level detection

for trace contaminants in the process gas. The closed ion

source analyzer is manufactured from vacuum prepared

stainless steel and high density alumina ceramics, and

features independently replaceable twin filaments to

provide built-in backup in the event of a filament failure.

The standard system includes a double filter analyzer for

increased sensitivity of higher mass species, contamination

resistance and enhanced long-term stability.

Each Vision 2000-C and Vision 2000-E system

incorporates a Remote Vacuum Controller (RVC) module

that provides fail-safe protection for both the process tool

and the RGA. It allows full operation and control of RGA

system components (filaments, pumps, inlet valves, bake-

out, etc.) from the system PC. The compact, remotely-

mounted rack module includes the RVC and power

supplies. The unit is easily mounted onto any standard

19” tool rack for mounting on a process chamber or other

compatible location. Thirty three foot (10 m) cables are

included as standard so that the probe assembly can be

located in a remote position.

Mobile RGA Platform

Any Vision 2000-C or Vision 2000-E can be mounted on a

mobile RGA platform with the convenience of being able

to move the RGA easily between chambers as the need

arises. The mobile platform has an integrated laptop table

and mounts the electronics on the trolley. Using a standard

ten foot (3m) cable loom the platform can be conveniently

located away from the RGA mounting point on the tool

chamber.

sampling at both background and process pressure

through orifices selected for the pressures to be

encountered. When not sampling, both the valve and

analyzer are automatically isolated from the process

chamber and purged with inert gas. Purging is done

through the mass spectrometer pumping systems, not

through the process chamber. Purging is also used

during bake-out, reducing initial startup time and residual

background recovery time. For sampling up to 10 Torr, a

special 4-valve UniBloc is available for bypass pumping

to facilitate the faster transfer of sample gas to the inlet,

thereby optimizing inlet response time. Above 10 Torr,

the 4-valve configuration is always used. The inlet valve

is operated by integrated electronics and controlled via

recipes from Process Eye Professional. The required valve

selection is made automatically by a gas independent

pressure sensor in the UniBloc inlet which also provides

a readout of the process chamber total pressure in the

Process Eye Professional software.

Computer-aided design was utilized to engineer the

Unibloc to have minimal internal volumes and surface

CVD and Etch process gases. The external seals are all

metal. A conformal heating jacket provides temperature

control to minimize deposition within the valve and to

maintain mobility of sticky/polar gases through the inlet.

The Vision 2000-C/E analyzer uses Process Eye

Professional, a highly flexible, modular application

operating under 32bit or 64bit Windows XP, Vista, Server

2008 or Windows 7. Designed with a “client/server”

structure, Process Eye Professional incorporates TCP/IP

protocol for full network compatibility.

Creating process recipes is made easy by the Recipe

Wizard function, which allows customized warnings and

alarm levels, triggered whenever the process exceeds

preset levels. The Process Eye Professional recipes also

specify the way in which the Vision 2000-C or Vision

2000-E acquires, displays and stores data. other key

parameters, such as ion source settings, can be set via

the Process Eye Professional recipe. This allows the

user to optimize settings for each phase of the process

independently. For example, ideal settings for baseline can

be set up in the baseline recipe, ideal settings for process

monitoring can be set in the process recipe, etc. Process

Eye Professional enhances the Vision 2000-C and Vision

2000-E by providing:

• Automated and intelligent operation of MKS Spectra

RGAs with fully customizable controls and alarms

• Recipes for automated calibration

• Flexible scanning

— “Bar Chart”, “Analog” and “Peak Jump” scanning

modes which can be mixed and associated with data

trend displays

• Intelligent, user defined warnings and alarms

— Can include a suggested diagnosis of the fault

condition and a recommendation for its solution

• Data displays in relevant units, such as Torr, mbar or Pa

in the process chamber

• Optional ability to read data from other sensors using

analog inputs and external events by digital inputs

• Data buffer for quick on-line review of recent data

• Full storage of all data for subsequent review and

analysis