AXQCM520-AU datasheet(1/2 Pages) AXTAL

Numer części	AXQCM520-AU

Szczegółowy opis	Size compatible to Ulvac

PDF	2 Pages

Scroll/Zoom	100%

Producent	AXTAL [Advanced XTAL Products]

Strona internetowa	http://www.axtal.com/index-engl.html

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1 / 2 page

AXQCM520‐Au

www.axtal.com

Roemerring 9

Drawing D1

fon: +49 (6261) 939834

D‐74821 Mosbach

page

1(2)

fax: +49 (6261) 939836

Germany

E‐mail: info@axtal.com

GmbH & Co. KG

Specification

AXQCM520‐Au

Rev.: 2

Date: 2014‐06‐02

Oscillator type : Quartz Crystal Microbalance Element

Size compatible to Ulvac(Initium), Showa, Sloan

Parameter

min.

typ. max. Unit

Condition

Nominal frequency

5.000

MHz

Adjustment frequency

4.995

MHz

Crystal cut

AT

Overtone

1

Adjustment tolerance

‐5

+5

kHz

@ 25°C

Frequency stability

Over operating temperature range ‐50

+50

ppm

Resonance resistance Rr

30

Ω

Motional capacitance C1

fF

Shunt capacitance C0

7

pF

Drive level

100

µW

Operating temperature range

0

+70

°C

Storage temperature range

‐40

+105 °C

QCM diameter

12.45 +0/‐0.03

mm

Blank surface quality

Fine lapped

Electrode diameter Side A

11.5 ± 0.1

mm

See drawing

Electrode material Side A

Cr‐Au

Electrode diameter Side B

11.5 ± 0.1

mm

See drawing

Electrode material Side B

Cr‐Au

A‐Side (plano)

B‐Side (convex)

φ 12. 45mm +0 - 0.03mm

φ 12. 45mm +0 - 0. 03mm

Ordering Code:

Model (Specification)

Frequency [MHz]

AXQCM520‐Au

4.995

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